Available for ImportVacuum Coating System with Magnetron Sputtering for Efficient Layer Application
Manufacturer:NIITM OJSC
Price:Request Quote
Bulk pricing available
FOB, CIF & EXW terms available
Description
Group processing of substrates: Ø76mm, Ø100mm, Ø150mm;
Two sluice chambers for loading - unloading of substrates from cassette to cassette;
Conveyor system for continuous transport of wafers;
Pre-heating of wafers by lamp heater and their cleaning by ion source;
Oil-free pumping system;
Consumption power not more than 25 kW.
Two sluice chambers for loading - unloading of substrates from cassette to cassette;
Conveyor system for continuous transport of wafers;
Pre-heating of wafers by lamp heater and their cleaning by ion source;
Oil-free pumping system;
Consumption power not more than 25 kW.
Specifications
Width
1100 mm
Length
2500 mm
Height
1600 mm
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Delivery Time
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