Available for Import
Plasma Etching Vacuum System with ICP Plasma Source TM 9 for Layer Processing
Bulk pricing available
FOB, CIF & EXW terms available
Description
Group or individual wafer processing in one technological cycle: 60x48 mm - 3 pcs; Ø 76, 100, 150 - 1 pc; HF electrode with substrate cooling; Etching speeds 0.5 - 1.5 µm/min; Measurement of RF displacement on RF electrode of substrate holder from 0 to 1000V; Regulation and automatic maintenance of RF ICP plasma source power level in the range of 400-600 W; Consumption power not more than 7 kW; Working gases: O?, SF?, C?F?, CHF? and others; Oil-free pumping system; Possibility to be built into the clean room.
Specifications
Share your requirements for a quick response!
Delivery & Payment
Shipping Terms
Delivery Time
Payment Methods
Similar Products You May Be Interested In
Solder Paste Melting Oven with Ethernet Control - Raduga 11
View Details
Vacuum Coating System for Magnetron Deposition "Oratoria 5-1
View Details
Plasma Chemical Deposition Vacuum System with ICP Source and Cassette Loader
View Details
Magnetron Sputtering Vacuum Coating System Magna TM 22
View Details
High-Density Coating Application System NIKA-15102
View Details
Vacuum Coating System UHN-74P-3M-3 for Metal Film Deposition
View Details
Plasma Chemical Anisotropic Selective Etching System Plasma TM 200-01
View Details
Four-Position Vacuum Coating System with Magnetron Sputtering and Electron Beam Evaporation, Model: 4P-VAC-2023
View Details
Vacuum Coating Machine UHN-71P-3M-2
View Details
Vacuum Coating System with Magnetron Sputtering and Cassette Loading MAGNA TM 29
View Details
Plasma Chemical Etching Vacuum System with ICP Source and Cassette Loading TM 300
View Details
Industrial-Oriented Technological Complex Cluster TM 200
View DetailsVerified Suppliers
All products are sourced directly from authorized Russian manufacturers
Quality Assurance
Products meet international quality standards with proper certification
Global Shipping
Reliable logistics solutions to deliver products to your location
Secure Payments
Multiple secure payment options to facilitate international transactions