Automatic RF Matching Device SURA-500-50-13 (0.5 kW)

Automatic RF Matching Device SURA-500-50-13 (0.5 kW)

Brand: Beams & Plasmas

$900 - $3,600 USD

MOQ: 2 pieces

Key Features

Maximum power: 0,5 l

Operating frequency: 13,56 t

Assignment: Provision of harmonisation of load having variable impedance with coaxial cable and output of high-frequency generator in manual and automatic modes.

Dustproof: Yes - The unit housing is made of metal and has no exposed live parts.

Supplier Information

LVT+ LLC

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Description

The automatic radio-frequency coordinating device SURA is designed to ensure coordination of the load with variable impedance, with coaxial cable and high-frequency generator output in manual and automatic modes.

The SURA matching device is equipped with:
- emergency interlocking system
- Modbus RTU protocol control
- RS-485 interface

*The device can be supplied in two versions: for inductive and capacitive loads.

Inductive loads - induction gas discharge systems, including radio frequency plasma generators.
Capacitive loads - high frequency magnetron sputtering systems, high frequency bias fed tables, high frequency glow discharge cleaning systems.

Operation manual is available on request: LCMK.303.00.00.00.00.000 RE SOURA-3000-50-13 ADJUSTING DEVICE

Specifications

Maximum power

0,5 l

Operating frequency

13,56 t

Assignment

Provision of harmonisation of load having variable impedance with coaxial cable and output of high-frequency generator in manual and automatic modes.

Dustproof

Yes - The unit housing is made of metal and has no exposed live parts.

Type of construction

Stationary

Warranty period

1 kVAr

Climatic designs

GOST 15150-69; GOST 15543-70 at normal values of climatic factors of the environment - UHL for product placement category 4.2

Power supply voltage

230 ±10% thousand m³

Minimum RF power

100 cm³

Input impedance

SBVVBG yd³

Maximum output current amplitude

75

Maximum voltage amplitude

5 billion m³

Maximum load reactance

150 t thrust

Interface

RS-485

Data transfer protocol

ModBus RTU

Overall dimensions, (length x width x height)

313x277x172 mm

Weight, not more

7 m² living area

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